In the present work, the mathematical model of a homogeneous, isotropic thermoelastic double porous micro-beam, based on the Euler-Bernoulli theory is developed in the context of Lord-Shulman [1] theory of thermoelasticity. Laplace transform technique has been used to obtain the expressions for lateral deflection, axial stress, axial displacement, volume fraction field and temperature distribut...

In this paper, the effect of the crack on dynamic behavior of cracked micro-beam in the presence of DC and AC loads are investigated. By applying the residual axial stress and fringing field stress, a nonlinear analytical model of cracked micro-beam is presented and crack is modeled by a massless rotational spring. The governing equation of the system is solved using Galerkin procedure and shoo...

Using a low temperature process flow, a photoresist ashing technique was developed to define nano-gaps for the fabrication of electrostatically transduced RF MEMS. This was performed by shrinking laterally the photoresist to the required dimension in a O2 plasma etch system. Polycrystalline silicon-germanium (poly-SiGe) films replaced poly silicon as the structural layer, while poly germanium w...

We introduce a particular low-symmetry (point group of unit cell C(1)) planar periodic arrangement of magnetic split-ring resonators that acts as an effective optical wave plate. We show that this behavior specifically results from the in-plane interactions among the individual split-ring resonators. Measured normal-incidence transmittance and conversion spectra of gold-based samples fabricated...

Title of dissertation: LEAD ZIRCONATE TITANATE THIN FILMS FOR PIEZOELECTRIC ACTUATION AND SENSING OF MEMS RESONATORS Brett Harold Piekarski, Doctor of Philosophy, 2005 Dissertation directed by: Professor Donald DeVoe Department of Mechanical Engineering and Bioengineering Graduate Program This research is focused on examining the potential benefits and limitations of applying sol-gel lead zirco...

Current rapid development in MEMS area has opened up many possibilities in nano-technology such as nano-fabrication. Among them is nanoscale wiring by both AFM (Atomic Force Microscope) tip and laser beam. Being able to make a relatively small deflection, a micro thermal actuator can be used to control the near field optics of the beam minutely and accurately. In this project, we will investiga...

In this article, transverse vibration of a cantilever nano- beam with functionally graded materials and carrying a concentrated mass at the free end is studied. Material properties of FG beam are supposed to vary through thickness direction of the constituents according to power-law distribution (P-FGM). The small scale effect is taken into consideration based on nonlocal elasticity theory of E...

Several types of microfabricated mechanical filters are analyzed for RF communications applications and their advantages over the traditional SAW or FBAR filters are described. GHz frequency operation requires sub-micron dimensions. This work focuses on the modeling of a filter with torsional mode vibration. Ansys finite element simulation has been performed to make comparison with the analytic...