Microdischarge devices having inverted, square pyramidal cathodes as small as 50 mm350 mm at the base and 35 mm in depth, have been fabricated in silicon and operated at gas pressures up to 1200 Torr. For the polyimide dielectric incorporated into these devices («r52.9), the discharges produced exhibit high differential resistance (;2310 V in Ne!, ignition voltages for a single device of ;260–2...

This article introduces a scanning probe lithography technique in which ultracompliant thermal probes are used in the selective thermochemical patterning of commercially available photoresist. The micromachined single-probe and multiprobe arrays include a thin-film metal resistive heater and sensor sandwiched between two layers of polyimide. The low spring constant s,0.1 N/md and high thermal i...

We have used thermal treatment and rubbed polyimide alignment layers to produce large domains of poly(9,9dioctylfluorene-co-bithiophene) alternating copolymer (F8T2). The direction of rubbing on the polyimide surface determines the orientation of these domains, allowing us to create thin-film transistors with channel lengths parallel and perpendicular to the liquid crystal polymer director. We ...

Nano-composite films have been the subject of extensive work for developing the energy-storage efficiency of electrostatic capacitors. Factors such as polymer purity, nanoparticle size, and film morphology drastically affect the electrostatic efficiency of the dielectric material that forms the insulating film between the conductive electrodes of a capacitor. This in turn affects the energy sto...

A novel laser-assisted chip bumping technique is presented in which bumps are fabricated on a carrier and subsequently transferred onto silicon chips by a laser-driven release process. Copper bumps with gold bonding layers and intermediate nickel barriers are fabricated on quartz wafers with pre-deposited polyimide layers, using UV lithography and electroplating. The bumps are thermosonically b...

In the present work, the immobilization of gelatin as biopolymer on two types of implantable biomaterials, polyimide and titanium, was compared. Both materials are known for their biocompatibility while lacking cell-interactive behavior. For both materials, a pre-functionalization step was required to enable gelatin immobilization. For the polyimide foils, a reactive succinimidyl ester was intr...

We explore periodic structures of smectic-C (SmC) liquid crystals, induced optically by a polarization grating. The studied cells contain a passive surface of rubbed polyimide and an active photosensitive substrate of azo-dye doped polyimide. In a nematic phase the director field can be periodic independent of the angle between the grating vector and the rubbing direction. In the SmA phase peri...

Polyimide has been widely applied to neural prosthetic devices, such as the retinal implants, due to its well-known biocompatibility and ability to be micropatterned. However, planar films of polyimide that are typically employed show a limited ability in reducing the distance between electrodes and targeting cell layers, which limits site resolution for effective multi-channel stimulation. In ...

Here we report a technique for transferring graphene layers, one by one, from a multilayer deposit formed by epitaxial growth on the Si-terminated face of a 6H-SiC substrate. The procedure uses a bilayer film of palladium/polyimide deposited onto the graphene coated SiC, which is then mechanically peeled away and placed on a target substrate. Orthogonal etching of the palladium and polyimide le...