Lead zirconate titanate (Pb(1.1)(Zr(0.52)Ti(0.48))O(3)) thin films of thickness 260 nm on Pt/Ti/SiO(2)/Si substrates were densified by 2.45 GHz microwave annealing. The PZT thin films were annealed at various annealing temperatures from 400 to 700 °C for 30 min. X-ray diffraction showed that the pyrochlore phase was transformed to the perovskite phase at 450 °C and the film was fully crystalliz...

This paper presents a triple-finger gripper driven by a piezoceramic (PZT) transducer for multi-target micromanipulation. The gripper consists of three fingers assembled on adjustable pedestals with flexible hinges for a large adjustable range. Each finger has a PZT actuator, an amplifying structure, and a changeable end effector. The moving trajectories of single and double fingers were calcul...

This paper proposes the idea of etching PZT to improve the temperature variation rate of a thicker PZT sheet in order to enhance the energy conversion efficiency when used as pyroelectric cells. A partially covered electrode was proven to display a higher output response than a fully covered electrode did. A mesh top electrode monitored the temperature variation rate and the electrode area. The...

First-principles calculations are performed to investigate alloying and fer-roelectric effects in lead zirconate titanate (PZT) with high Ti composition. We find that the main effect of alloying in the paraelectric phase of PZT is the existence of two sets of B–O bonds, i.e., shorter Ti–O bonds vs. longer Zr–O bonds. On the other hand, ferroelectricity leads to the formation of very short coval...

In recent years, impedance measurement method by piezoelectric (PZT) wafer activesensor (PWAS) has been widely adopted for non-destructive evaluation (NDE). In this method, theelectrical impedance of a bonded PWAS is used to detect a structural defect. The electro-mechanicalcoupling of PZT materials constructs the original principle of this method. Accordingly, the electricalimpedance of PWAS c...

Energy harvesting technologies that are engineered to miniature sizes, while still increasing the power delivered to wireless electronics, (1, 2) portable devices, stretchable electronics, (3) and implantable biosensors, (4, 5) are strongly desired. Piezoelectric nanowire- and nanofiber-based generators have potential uses for powering such devices through a conversion of mechanical energy into...

Load-depth curves of an unpoled Lead Zirconate Titanate (PZT) film composite as a function of temperature were measured by nanoindentation technique. Its reduce modulus and hardness were calculated by the typical Oliver-Pharr method. Then the true modulus and hardness of the PZT film were assessed by decoupling the influence of substrate using methods proposed by Zhou et al. and Korsunsky et al...

This paper proposes a stripe-PZT sensor-based baseline-free crack diagnosis technique in the heat affected zone (HAZ) of a structure with a welded stiffener. The proposed technique enables one to identify and localize a crack in the HAZ using only current data measured using a stripe-PZT sensor. The use of the stripe-PZT sensor makes it possible to significantly improve the applicability to rea...

Abstract − A new cutting device driven by an enlargement mechanism with a PZT drive has been developed to realize positioning the cutting tool from nm to mm. In this study, the mechanical principal of a newly developed enlargement mechanism consisting of fluid chamber, a PZT device, and cutting tool stage is reported. The basic performances of the developed mechanism are also evaluated. This de...

MEMS micropumps, based on PZT membranes have been designed and fabricated at the Microtechnology Laboratory of the University of Minnesota for use in fluid flow control, and as chemical and pressure sensors. Design, fabrication and numerical analyses of the PZT cantilever beams were presented at the MSM99, and are now extended to new MEMS devices; specifically reactive ion etched (RIE) bulk mic...