3D-Printed MEMS Magnetometer Featuring Compliant Mechanism
نویسندگان
چکیده
منابع مشابه
Design and Analyses of a MEMS Based Resonant Magnetometer
A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density....
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ژورنال
عنوان ژورنال: Proceedings
سال: 2018
ISSN: 2504-3900
DOI: 10.3390/proceedings2130784