4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging
نویسندگان
چکیده
منابع مشابه
4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging
Charlie V. Lam Boston Micromachines Corporation 30 Spinelli Place Cambridge, Massachusetts 02138 Abstract. We present the progress in the development of a 4096element microelectromechanical systems !MEMS" deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4 !m of stroke, a surface finish of "10 nm rms, a fill factor of 99.5%, and a bandwidth of ...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2009
ISSN: 1932-5150
DOI: 10.1117/1.3158067