A low pressure meter based on a capacitive micro sensor
نویسندگان
چکیده
منابع مشابه
Couple Stress Effect on Micro/Nanocantilever-based Capacitive Gas Sensor
Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...
متن کاملA Textile Based Capacitive Pressure Sensor
Background. As interest on wearable computing [1] increases, researchers are looking for new materials to use as a support for electronics. A fabric substrate is very appealing: it is elastic and extensible [2], supported by a well known technology and produced at low-cost. State of the art. Some smart pressure-sensors interfacing with a flexible substrate have been developed, but they are eith...
متن کامل5.4: A Textile Based Capacitive Pressure Sensor
INTRODUCTION The sense of touch plays an important role in everyday life. It provides the body with early contact to surrounding objects. By touching an object, we can tell if it is sharp or smooth; by holding it, we can estimate its weight. Skin is the most extended sensor of the entire human body. The haptic interface gives the first feedback to object manipulation; without sensing the pressu...
متن کاملCapacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consi...
متن کاملCompact Mass Flow Meter Based on a Micro Coriolis Flow Sensor
In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Physics Procedia
سال: 2009
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2009.11.122