A MEMS electrostatic particle transportation system
نویسندگان
چکیده
منابع مشابه
A Mems Electrostatic Particle Transportation System
We demonstrate here an electrostatic MEMS system capable of transporting particles 5-10pm in diameter in air. This system consists of 3-phase electrode arrays covered by insulators (Figs. I , 2). Extensive testing of this system has been done using a variety of insulation materials (silicon nitride, photoresist, and Teflon), thickness (012pm), particle sizes (11 Opm), particle materials (metal,...
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The mass-spring model of electrostatically actuated microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) is pervasive in the MEMS and NEMS literature. Nonetheless a rigorous analysis of this model does not exist. Here periodic solutions of the canonical mass-spring model in the viscosity dominated time harmonic regime are studied. Ranges of the dimensionless average app...
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The use of electrostatic forces to provide actuation is a method of central importance in microelectromechanical systems (MEMS) and is of growing importance in nanoelectromechanical systems (NEMS). The study of electrostatic actuation has led to numerous interesting experimental, theoretical, and numerical results. Yet, surprisingly, even simple electrostatically actuated systems have secrets t...
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Perhaps the most widely known nonlinear phenomena in nanoand microelectromechanical systems is the “pull-in” or “jump-to-contact” instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state configuration of the device where mechanical members remain separate. This instability affects the design of many devices. It may...
متن کاملReview on the Modeling of Electrostatic MEMS
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, re...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 1999
ISSN: 0924-4247
DOI: 10.1016/s0924-4247(98)00252-0