A MEMS Flow Sensor for Self-adjusted Precise Non-Contact Liquid Dispensing

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Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing

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ژورنال

عنوان ژورنال: Research Journal of Applied Sciences, Engineering and Technology

سال: 2013

ISSN: 2040-7459,2040-7467

DOI: 10.19026/rjaset.5.5047