A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film
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چکیده
منابع مشابه
A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film
An oxygen gas microsensor based on nanostructured sol-gel TiO2 thin films with a buried Pd layer was developed on a silicon substrate. The nanostructured titania thin films for O2 sensors were prepared by the sol-gel process and became anatase after heat treatment. A sandwich TiO2 square board with an area of 350 μm × 350 μm was defined by both wet etching and dry etching processes and the wet ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2014
ISSN: 1424-8220
DOI: 10.3390/s140916423