A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Micromachines
سال: 2021
ISSN: 2072-666X
DOI: 10.3390/mi12060714