A Stray-Field-Immune Magnetic Displacement Sensor With 1% Accuracy
نویسندگان
چکیده
منابع مشابه
An Imaging Displacement Sensor with Nanometer Accuracy
An imaging displacement sensor (IDS) has been developed that can measure the displacement with an accuracy of 30 nm in 0.03 s with the precision improving to 1 nm for averaging times of 100 s. The IDS consists simply of a light emitting diode (LED) pinhole collimator and a charge-coupled device (CCD) camera chip. The position accuracy is better than 0.05% over the few mm CCD size with deviation...
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ژورنال
عنوان ژورنال: IEEE Sensors Journal
سال: 2020
ISSN: 1530-437X,1558-1748,2379-9153
DOI: 10.1109/jsen.2020.2998289