A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement
نویسندگان
چکیده
منابع مشابه
Properties of piezoelectric PZT thin films for microactuator applications
The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating ...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2014
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/24/7/075017