AC parallel local oxidation of silicon
نویسندگان
چکیده
منابع مشابه
Parallel-local anodic oxidation of silicon surfaces by soft stamps.
We investigate the fabrication of nanometric patterns on silicon surfaces by using the parallel-local anodic oxidation technique with soft stamps. This method yields silicon oxide nanostructures 15 nm high, namely at least five times higher than the nanostructures made with local anodic oxidation using atomic force microscopy, and thanks to the size of the stamp enables one to pattern the surfa...
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ژورنال
عنوان ژورنال: Nanoscale Advances
سال: 2019
ISSN: 2516-0230
DOI: 10.1039/c9na00445a