An Electrostatic Microactuator for Positioning a Hard-Disk Drive Magnetic Head
نویسندگان
چکیده
منابع مشابه
A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control
A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2004
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.124.21