An Inner-Magnet Type Micro-Sputtering Apparatus. (2). Two Prototypes for Various Applications.
نویسندگان
چکیده
منابع مشابه
A New Sputtering Apparatus
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 1994
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.15.316