An introduction to lithography methods and providing a practical method for its optimization

نویسندگان

چکیده

In the first part of present article, important and main methods photolithography are reviewed discussed. Then we introduce ways to improve images created on photoresist, which is material lithography. Lithography with high-energy particle soft lithography then described. second part, contact-photolithography method its improvement process, use in our laboratory, introduced described detail. We used this for make diffraction optical elements a glass substrate, doped by silver nanoparticles, using helium ion beam. Light from masks prevents access very small images. To reduce influence quality produced elements, adapted optimized contact-lithography project. Our solution, presented practical available other researchers Iran

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ژورنال

عنوان ژورنال: Iranian Journal of Physics Research

سال: 2022

ISSN: ['2345-3664', '1682-6957']

DOI: https://doi.org/10.47176/ijpr.22.1.31218