Anion Order and Spontaneous Polarization in LaTiO2N Oxynitride Thin Films
نویسندگان
چکیده
منابع مشابه
Mesoporous silicon oxynitride thin films.
Highly-ordered, pore-modified with amine groups, and glass-like mesoporous silicon oxynitride thin films were prepared by heat treatment of as-synthesized mesoporous silica thin films in a flowing ammonia environment at high temperatures.
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1 Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-0033 Japan 2 Kanagawa Academy of Science and Technology (KAST), 3-2-1 Sakado, Takatsu, Kawasaki 213-0012 Japan 3 CREST, Japan Science and Technology Agency, 7-3-1 Hongo, Bunkyo, Tokyo 113-0033 Japan 4 Tandem Accelerator Complex, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, 305-8577 5 Departm...
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Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. When the target was sputtered under poisoned surface conditions, the film com...
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چکیده ندارد.
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ژورنال
عنوان ژورنال: Physical Review Letters
سال: 2018
ISSN: 0031-9007,1079-7114
DOI: 10.1103/physrevlett.120.046001