Application of Wet Etching. Etching Technology for Various Plastics.

Wet anisotropic etching of polyimide

With the aim of developing flexible biocompatible implants for in vivo studies of nerve regeneration [1], fabrication of passive polyimide membranes using the commercial available Kapton film (100HN and 50HN, from DuPont) was investigated. Polyimide has been widely used in microelectronics, and its application possibilities have been widening to other fields such as micromachining and biomedica...

Etching Technology for Microchannels

can be varied from perfectly isotropic to exactly straight. Also positive or negative tapering is po~s ib le .~ Various ways of fabricating channels in silicon are The basic approach for disyussed. Some new channels are presented: the constructing channels in GPSIC's and the LPCVD covered channels. Also some silicon is almost always attention is paid to the problem of making connections as depi...

Wet and Dry Etching Theory

Wet anisotropic etching for fluidic 1D nanochannels

In this paper a method is proposed to fabricate channels for fluidic applications with a depth in the nanometer range. Channels with smooth and straight sidewalls are constructed with the help of micromachining technology by etching shallow trenches into 〈110〉 silicon using native oxide as a mask material and OPD resist developer as the etchant. Sub-50 nm deep fluidic channels are formed after ...

Etching technology for chromatography microchannels

Half-circular channels, to be used for gas chromatography, were etched isotropically using a mixture of HF, HN09 and HzO. Two wafers with half-circular channels were bonded on top of each other to yield channels with a circular cross-section. During etching the so-called “loading effect” was encountered: the etch rate depends on the local structure density. To solve this, extra structures were ...