Atomic-Resolution STEM Imaging of Materials Using a Segmented Annular All Field Detector
نویسندگان
چکیده
منابع مشابه
Atomic-Resolution Scanning Transmission Electron Microscopy with Segmented Annular All Field Detector
Aberration-corrected scanning transmission electron microscopy (STEM) has become an indispensable tool for characterizing atomic-scale structure in materials and devices. In STEM, a finely focused electron probe is scanned across the specimen and transmitted and/or scattered electrons from a localized material volume are detected by the post specimen detector(s) as a function of raster position...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2010
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927610058083