Bonding of polydimethylsiloxane microfluidics to silicon-based sensors
نویسندگان
چکیده
منابع مشابه
Parylene to silicon nitride bonding for post-integration of high pressure microfluidics to CMOS devices.
High pressure-rated channels allow microfluidic assays to be performed on a smaller footprint while keeping the throughput, thanks to the higher enabled flow rates, opening up perspectives for cost-effective integration of CMOS chips to microfluidic circuits. Accordingly, this study introduces an easy, low-cost and efficient method for realizing high pressure microfluidics-to-CMOS integration. ...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2011
ISSN: 1932-5150
DOI: 10.1117/1.3659139