Calibration method for rotating-analyzer ellipsometers
نویسندگان
چکیده
منابع مشابه
Calibration method for rotating-analyzer ellipsometers
One of the main sources of errors in ellipsometry is inaccurate calibration; if the plane of incidence is not known correctly, all azimuthal angles of the optical components involved, such as the polarizer, the analyzer, and sometimes the compensator, contain errors. Thus calibration errors proliferate, leading ultimately to errors in the measured quantities A and *. Not withstanding the fact t...
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ژورنال
عنوان ژورنال: Journal of the Optical Society of America A
سال: 1988
ISSN: 1084-7529,1520-8532
DOI: 10.1364/josaa.5.001466