Channeling in helium ion microscopy: Mapping of crystal orientation
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چکیده
منابع مشابه
Channeling in helium ion microscopy: Mapping of crystal orientation
BACKGROUND The unique surface sensitivity and the high resolution that can be achieved with helium ion microscopy make it a competitive technique for modern materials characterization. As in other techniques that make use of a charged particle beam, channeling through the crystal structure of the bulk of the material can occur. RESULTS Here, we demonstrate how this bulk phenomenon affects sec...
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BACKGROUND Helium ion microscopy is a new high-performance alternative to classical scanning electron microscopy. It provides superior resolution and high surface sensitivity by using secondary electrons. RESULTS We report on a new contrast mechanism that extends the high surface sensitivity that is usually achieved in secondary electron images, to backscattered helium images. We demonstrate ...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2012
ISSN: 2190-4286
DOI: 10.3762/bjnano.3.57