Characterization and control of a pneumatic microactuator with an integrated inductive position sensor

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Characterization and control of a pneumatic microactuator with an integrated inductive position sensor

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ژورنال

عنوان ژورنال: Sensors and Actuators A: Physical

سال: 2008

ISSN: 0924-4247

DOI: 10.1016/j.sna.2007.07.012