Closed-Loop Control of a Piezo-Fluidic Amplifier

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High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input shaper

Article history: Received 29 June 2013 Revised 23 February 2014 Accepted 28 February 2014 Available online xxxx

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ژورنال

عنوان ژورنال: AIAA Journal

سال: 2020

ISSN: 0001-1452,1533-385X

DOI: 10.2514/1.j059305