Co-planar multiple-ring electrostatic particle-beam lenses
نویسندگان
چکیده
منابع مشابه
Three-Dimensional Simulation of Airflow and Nano-Particle Beam Focusing in Aerodynamic Lenses(RESEARCH NOTE)
In this paper airflow, nano-and micro-particle motions in an aerodynamic particle beam focusing system consisting of several lenses, a nozzle and the downstream chamber, was studied. A three-dimensional numerical simulation for the system was presented and the compressible airflow and thermal conditions in the aerodynamic lens system were evaluated. Dilute particle concentration was assumed so ...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1994
ISSN: 0734-211X
DOI: 10.1116/1.587457