Coating of Silicon Nitride Fine-powder on Silicon Nitride Particles.

Pattern Photoresist Silicon Silicon Nitride Silicon Photoresist Silicon Nitride Silicon Etch Nitride Remove Photoresist

In this proposal we seek to establish a porous silicon based etching process in the WTC microfabrication laboratory. The new process will allow us to etch high aspect ratio holes through a wafer. Holes like these are important for decreasing the dead volume of connections between micro and macro systems and for increasing the complexity of micro-fluidic systems. At the present time, the minimum...

Hydroxyapatite Coating on Silicon Nitride Surfaces Using the Biomimetic Method

Silicon nitride based ceramics are promising candidates for biomedical applications due to their chemical and dimensional stability associated to suitable mechanical strength and relatively high fracture toughness. However, the bioinert characteristics of these ceramics limit their application to situations where the formation of chemical bonds between the material and the tissue are not essent...

Silicon Nitride and Silicon Carbide

MICROSTRUCTURAL STUDY OF SILICON NITRIDE WHISKERS PRODUCED BY NITRIDATION OF PLASMA-SPRAYED SILICON LAYERS

plasma-sprayed silicon layers have been used to produce silicon nitride layers with fibrous microstructure which optimizes fracture toughness and strength. SEM examination of the specimens shows that the surface is covered by fine needles and whiskers of Si3N4.In order to study the oxygen contamination effect as well as other contaminants introduced during spraying and nitridation processes, su...

Plasma Deposition of Silicon Nitride

This paper reports on the preparation and characterization of thin films of silicon nitride deposited on heated silicon substrates from Si(CH, ),-NHS-H, mixtures activated at room temperature by an a-c. discharge at low frequency. The films were deposited at 800°C. Deposition rate as well as refractive index were measured and several parameters were systematically varied , including deposition ...