Cohesion Property of Polymer Aggregates in Resist Pattern Analyzed by Atomic Force Microscope (AFM).
نویسندگان
چکیده
منابع مشابه
Polymer Characterization with the Atomic Force Microscope
Atomic force microscopy is a powerful characterization tool for polymer science, capable of revealing surface structures with superior spatial resolution [1]. The universal character of repulsive forces between the tip and the sample, which are employed for surface analysis in AFM, enables examination of even single polymer molecules without disturbance of their integrity [2]. Being initially d...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2002
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.15.371