Complex phase compositions in nanostructured coatings as evidenced by photoelectron spectroscopy: The case of Al–Si–N hard coatings
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2010
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.3460099