Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target

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ژورنال

عنوان ژورنال: Journal of Vacuum Science & Technology A

سال: 2019

ISSN: 0734-2101,1520-8559

DOI: 10.1116/1.5065468