Continuous Process for the Etching, Rinsing and Drying of MEMS Using Supercritical Carbon Dioxide
نویسندگان
چکیده
منابع مشابه
Continuous Synthesis of Oleyl Oleate in Supercritical Carbon Dioxide using Solid p-Toluenesulfonic Acid as Catalyst
Supercritical carbon dioxide (SC-CO2) was used as solvent to synthesize oleyl oleate as an analog of Jojoba oil from oleic acid and oleyl alcohol with high conversion (100%) of the acid into ester in a short time of 100 min. Utilizing a low cost solid catalyst, p-toluenesulfonic acid monohydrate (PTSA), the esterification reaction was performed, without any prior preparation step...
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Heterogeneous esterification of 2-ethyl-1-hexanol and 2-ethyl hexanoic acid using AMBERLYST 15 as solid acid-catalyst in supercritical carbon dioxide (SC-CO2) has been studied. Effect of pressure (150, 200, and 250 bar), temperature (75, 110, and 140 C), flow rate of liquid CO2 (0.4, 0.6, and 0.8 mL.min), type of sample collection, and mole ratio of alcohol to acid (2:1, 1:1, and 1:2) on ester ...
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Supercritical carbon dioxide has gained increasing attention in food and pharmaceutical processing owing to the fact that it is environmentally inexpensive, not flammable, essentially non-toxic, and it has a convenient critical point. Also, it has been attracting much attention in many fields, such as extraction of sensitive materials and pharmaceutical processing and polymerization processes. ...
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ژورنال
عنوان ژورنال: Korean Chemical Engineering Research
سال: 2015
ISSN: 0304-128X
DOI: 10.9713/kcer.2015.53.5.557