Continuous Process for the Etching, Rinsing and Drying of MEMS Using Supercritical Carbon Dioxide

نویسندگان
چکیده

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Continuous Synthesis of Oleyl Oleate in Supercritical Carbon Dioxide using Solid p-Toluenesulfonic Acid as Catalyst

Supercritical carbon dioxide (SC-CO2) was used as solvent to synthesize oleyl oleate as an analog of Jojoba oil from oleic acid and oleyl alcohol with high conversion (100%) of the acid into ester in a short time of 100 min. Utilizing a low cost solid catalyst, p-toluenesulfonic acid monohydrate (PTSA), the esterification reaction was performed, without any prior preparation step...

متن کامل

Continuous Esterification in Supercritical Carbon Dioxide

Heterogeneous esterification of 2-ethyl-1-hexanol and 2-ethyl hexanoic acid using AMBERLYST 15 as solid acid-catalyst in supercritical carbon dioxide (SC-CO2) has been studied. Effect of pressure (150, 200, and 250 bar), temperature (75, 110, and 140 C), flow rate of liquid CO2 (0.4, 0.6, and 0.8 mL.min), type of sample collection, and mole ratio of alcohol to acid (2:1, 1:1, and 1:2) on ester ...

متن کامل

Measurement and Modeling of Acridine Solubility in Supercritical Carbon Dioxide

Supercritical carbon dioxide has gained increasing attention in food and pharmaceutical processing owing to the fact that it is environmentally inexpensive, not flammable, essentially non-toxic, and it has a convenient critical point. Also, it has been attracting much attention in many fields, such as extraction of sensitive materials and pharmaceutical processing and polymerization processes. ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Korean Chemical Engineering Research

سال: 2015

ISSN: 0304-128X

DOI: 10.9713/kcer.2015.53.5.557