Coupled mechanical and helicon oscillations
نویسندگان
چکیده
منابع مشابه
Coupled Helicon-cyclotron Modes: Theory and Experiment
Helicon discharges, noted for their exceptional ionization efficiency and high densities, are now used in plasma processing. The weak magnetic fields used in plasma etch reactors lead to non-negligible values of δ = ω/ωc , necessitating the addition of electron mass m effects to simple helicon theory. This introduces a second root with the same parallel wavenumber k, which we shall call a Trive...
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ژورنال
عنوان ژورنال: Journal of Physics C: Solid State Physics
سال: 1971
ISSN: 0022-3719
DOI: 10.1088/0022-3719/4/7/517