Design and Characterization of a Micro-Fabricated Graphene-Based MEMS Microphone

Fabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphragm

In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...

MEMS-Based Micro Gas Chromatography: Design, Fabrication and Characterization

Characterization of Graphene-based FET Fabricated using a Shadow Mask

To pattern electrical metal contacts, electron beam lithography or photolithography are commonly utilized, and these processes require polymer resists with solvents. During the patterning process the graphene surface is exposed to chemicals, and the residue on the graphene surface was unable to be completely removed by any method, causing the graphene layer to be contaminated. A lithography fre...

Design and Fabrication of a Novel MEMS Silicon Microphone

A microphone is a transducer that converts acoustic energy into electrical energy. Microphones are widely used in voice communications devices, hearing aids, surveillance and military aims, ultrasonic and acoustic distinction under water, and noise and vibration control (Ma et al. 2002). Micromachining technology has been used to design and fabricate various silicon microphones. Among them, the...

Development and Characterization of Surface Micro-machined Mems Based Varactor

This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The ...