Development of a pressure sensor using a piezoelectric material thin film

MEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out

We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...

A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor

The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin f...

Piezoelectric thin-film superlattices without using piezoelectric materials

In this paper we show that experimentally realizable apparently piezoelectric thin-film superlattices can be created from nonpiezoelectric materials provided an odd-order e.g., trilayer stacking sequence is used. The size-dependent mechanism of flexoelectricity, which couples gradients of strain to polarization, allows such a possibility. We present closed-form analytical expressions for the re...

Development of a Thin Film Magnetic Moment Reference Material

In this paper we present the development of a magnetic moment reference material for low moment magnetic samples. We first conducted an inter-laboratory comparison to determine the most useful sample dimensions and magnetic properties for common instruments such as vibrating sample magnetometers (VSM), SQUIDs, and alternating gradient field magnetometers. The samples were fabricated and then me...

Piezoelectric Pressure Sensor Based on Enhanced Thin-Film PZT Diaphragm Containing Nanocrystalline Powders