Dislocation density reduction using overgrowth on hole arrays made in heteroepitaxial diamond substrates

Fabrication of Low Dislocation Density, Single-Crystalline Diamond via Two-Step Epitaxial Lateral Overgrowth

Continuous diamond films with low dislocation density were obtained by two-step epitaxial lateral overgrowth (ELO). Grooves were fabricated by inductively coupled plasma etching. Mo/Pd stripes sputtered in the grooves were used to inhibit the propagation of dislocations originating from the diamond substrate. Coalescent diamond films were achieved by ELO via microwave plasma-enhanced chemical v...

Modeling of Threading Dislocation Density Reduction in Heteroepitaxial Layers I. Geometry and Crystallography

The geometry of threading dislocations (TDs), non-equilibrium defects that are generated as a r e sult of stress relaxation in thin films, is considered in order to provide a basis for their reduction behavior during heteroepitaxial growth. This paper, the first of a two-part series, discusses the geometric possibility for reactions between TDs as a result of film growth. It is demonstrated tha...

Reduction of dislocation density in epitaxial GaN layers by overgrowth of defect-related etch pits

Dislocation density reduction in GaN using porous SiN interlayers

The influence of a thin porous SiNX interlayer on the growth of GaN by metalorganic chemical vapor deposition (MOCVD) has been studied. The interlayer is deposited on a GaN template by introducing silane in the presence of ammonia into the MOCVD chamber, and a GaN overlayer is deposited on the interlayer. The SiNX interlayer produces inhomogeneous nucleation and lateral growth of the overlayer,...

Misfit-dislocation-mediated heteroepitaxial island diffusion

a r t i c l e i n f o Scanning tunneling microscopy combined with molecular dynamics simulations reveals a dislocation-mediated island diffusion mechanism for Cu on Ag(111), a highly mismatched system. Cluster motion is tracked with atomic precision at multiple temperatures and diffusion barriers and prefactors are determined from direct measurements of hop rates. The barrier to nucleate a disl...