Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction

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Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction

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ژورنال

عنوان ژورنال: Proceedings

سال: 2017

ISSN: 2504-3900

DOI: 10.3390/proceedings1040300