Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Coatings
سال: 2020
ISSN: 2079-6412
DOI: 10.3390/coatings10070692