Effect of plasma hydrodynamics on laser-produced bremsstrahlung MeV photon dose
نویسندگان
چکیده
منابع مشابه
Radiation-Hydrodynamics, Spectral, and Atomic Physics Modeling of Laser-Produced Plasma EUV Lithography Light Sources
Tin, lithium, and xenon laser-produced plasmas are attractive candidates as light sources for extreme ultraviolet lithography (EUVL). Simulation of the dynamics and spectral properties of plasmas created in EUVL experiments plays a crucial role in analyzing and interpreting experimental measurements, and in optimizing the 13.5 nm radiation from the plasma source. Developing a good understanding...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2020
ISSN: 1070-664X,1089-7674
DOI: 10.1063/5.0019816