Effect of reflector bias voltage on the nanocrystallization of silicon thin films by reactive particle beam assisted chemical vapor deposition
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چکیده
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Effect of bias voltage on structural and mechanical characteristics of diamond-like carbon thin film applied by ion beam deposition
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2011
ISSN: 1882-0743,1348-6535
DOI: 10.2109/jcersj2.119.922