Effect of RF Power on SnO Thin Films Obtained by Sputtering
نویسندگان
چکیده
منابع مشابه
The effect of sputtering RF power on structural, optical and electrical properties of CuO and CuO2 thin films
In this paper, the RF power change effect on the structural, optical and electrical properties of CuO thin films prepared by RF reactive magnetron sputtering deposited on glass substrates are studied. At first, the thin films are prepared at 150, 280, 310 and 340W respectively. Then, the films are characterized by XRD, AFM, Uv-visible and four-point probe analysis respectively. The results show...
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ژورنال
عنوان ژورنال: Journal of the Korean Ceramic Society
سال: 2012
ISSN: 1229-7801
DOI: 10.4191/kcers.2012.49.5.399