(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
سال: 1994
ISSN: 0885-3010
DOI: 10.1109/58.265813