Electron heating mode transitions in dual frequency capacitive discharges
نویسندگان
چکیده
منابع مشابه
Electron heating mode transitions in dual frequency capacitive discharges
We consider electron heating in the sheath regions of capacitive discharges excited by a combination of two frequencies, one much higher than the other. There is a common supposition that in such discharges the higher frequency is the dominant source of electron heating. In this letter, we discuss closed analytic expressions quantifying the Ohmic and collisionless electron heating in a dual fre...
متن کاملCollisionless heating in capacitive discharges enhanced by dual-frequency excitation.
We discuss collisionless electron heating in capacitive discharges excited by a combination of two disparate frequencies. By developing an analytical model, we find, contrary to expectation, that the net heating in this case is much larger than the sum of the effects occurring when the two frequencies act separately. This prediction is substantiated by kinetic simulations, which are also in exc...
متن کاملElectron Heating by ICRF Mode-Conversion Heating in LHD
Electron heating regime using with radio-frequency waves in the ion cyclotron range of frequencies (ICRF) has been investigated in helical magnetic configuration. Mode-conversion scenario was applied to the LHD plasmas. When the wave frequency is change to be lower than that in the standard ICRF heating (minority ion heating) condition, the resonance layers are moved away to the peripheral regi...
متن کاملPenning-dominated capacitive discharges
Atmospheric pressure radio-frequency (rf) capacitive micro-discharges are of interest due to emerging applications, especially in the bio-medical field. A previous global model did not consider high-power phenomena such as sheath multiplication, thus limiting its applicability to the lower power range. To overcome this, we use one-dimensional particle-in-cell (PIC) simulations of atmospheric He...
متن کاملNarrow gap electronegative capacitive discharges
Narrow gap electronegative (EN) capacitive discharges are widely used in industry and have unique features not found in conventional discharges. In this paper, plasma parameters are determined over a range of decreasing gap length L from values for which an electropositive (EP) edge exists (2-region case) to smaller L-values for which the EN region connects directly to the sheath (1-region case...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2006
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2402226