Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process
نویسندگان
چکیده
منابع مشابه
Surface micromachined electrostatically actuated micro peristaltic pump.
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ژورنال
عنوان ژورنال: World Journal of Engineering and Technology
سال: 2017
ISSN: 2331-4222,2331-4249
DOI: 10.4236/wjet.2017.54b014