Fabrication of an Au–Au/carbon nanotube-composite contacts RF-MEMS switch
نویسندگان
چکیده
منابع مشابه
RF MEMS Switch Technology
Commercial Applications Solid state and electromagnetic relay switches are being replaced by MEMS switches due to their lower costs and increased application performance. Some of the benefits of MEMS switches include low power consumption, long life cycle, linearity and increased switching speeds. Applications include highspeed digital channel switching in automated test equipment, filter bank ...
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MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...
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By controlling the degrees of freedom for the components in the system and using a PWL solver, a tradeoff between speed and accuracy is realized. Electrical components are modeled using a similar MNA technique. The interaction between electrical and mechanical components is accomplished by modeling the coupled energy between the domains. In this paper we demonstrate the capabilities of our syst...
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RF-MEMS technology has the potential of replacing many of the mechanical and semiconductor switches used in mobile and satellite communication systems. In many cases, such RF-MEMS switches would not only reduce substantially the size and power consumption, but also promise superior performance. The paper reviews the recent development of RF MEMS switches and switch matrices. Several configurati...
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ژورنال
عنوان ژورنال: Micro and Nano Systems Letters
سال: 2018
ISSN: 2213-9621
DOI: 10.1186/s40486-018-0068-z