Fabrication of microfluidic cavities using Si-to-glass anodic bonding
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2018
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.5031837