Fabrication Suspended High-Aspect-Ratio Parylene Structures for Large Displacement Requirements
نویسندگان
چکیده
منابع مشابه
High Aspect Ratio Parylene Etching for Microfluidics and Biomems
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ژورنال
عنوان ژورنال: International Journal of Automation and Smart Technology
سال: 2014
ISSN: 2223-9766
DOI: 10.5875/ausmt.v4i2.343