Fast ellipsometric measurements based on a single crystal photo-elastic modulator
نویسندگان
چکیده
منابع مشابه
Fast ellipsometric measurements based on a single crystal photo-elastic modulator.
For quality control in high volume manufacturing of thin layers and for tracking of physical and chemical processes, ellipsometry is a common measurement technology. For such kinds of applications we present a novel approach of fast ellipsometric measurements. Instead of a conventional setup that uses a standard photo-elastic modulator, we use a 92 kHz Single Crystal Photo-Elastic Modulator (SC...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.021410