Film Deposition and Micro-machining of Smart Actuator Materials for MEMS Applications
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of The Surface Finishing Society of Japan
سال: 2017
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.68.373