Flow sensing by buckling monitoring of electrothermally actuated double-clamped micro beams
نویسندگان
چکیده
منابع مشابه
Displacement Sensing Based on Resonant Frequency Monitoring of Electrostatically Actuated Curved Micro Beams.
The ability to control nonlinear interactions of suspended mechanical structures offers a unique opportunity to engineer rich dynamical behavior that extends the dynamic range and ultimate device sensitivity. We demonstrate a displacement sensing technique based on resonant frequency monitoring of curved, doubly clamped, bistable micromechanical beams interacting with a movable electrode. In th...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2016
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4961582