Folding energetics in thin-film diaphragms

Folding energetics in thin- ̄lm diaphragms

By G. Gioia1, A. DeSimone2, M. Ortiz3 and A. M. Cu i t i ~ no4 1Theoretical and Applied Mechanics, University of Illinois, Urbana, IL 61801, USA ([email protected]) 2Max Planck Institute for Mathematics in the Sciences, 04103 Leipzig, Germany Graduate Aeronautical Laboratories, California Institute of Technology, Pasadena, CA 91125, USA 4Mechanical and Aerospace Engineering, Rutgers University, P...

Piezoelectric actuation of PZT thin film diaphragms at static and resonant conditions

The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflections has been studied as a function of membrane thickness and d.c. bias. The total stress in the films and the piezoelectric constant, d31, have...

Bending, Wrinkling, and Folding of Thin Polymer Film/Elastomer Interfaces

Process Optimization of Deposition Conditions for Low Temperature Thin Film Insulators used in Thin Film Transistors Displays

Deposition process for thin insulator used in polysilicon gate dielectric of thin film transistors are optimized. Silane and N2O plasma are used to form SiO2 layers at temperatures below 150 ºC. The deposition conditions as well as system operating parameters such as pressure, temperature, gas flow ratios, total flow rate and plasma power are also studied and their effects are discussed.  The p...

1 Thin - Film Capacitance

Models for distributed capacitance in a thin lm are derived in the form of a system of local RC diiusion equations coupled by a global elliptic equation. Such models contain the local geometry of the distributed capacitance on which charge is stored and the exchange of current ux on its interface with the medium. Certain singular limits are characterized, and the resulting degenerate initial-bo...