Fully integrated electrothermal multidomain modeling of RF MEMS switches
نویسندگان
چکیده
منابع مشابه
RF MEMS Switches and Integrated Switching Circuits
Radio frequency (RF) microelectromechanical systems (MEMS) have been pursued for more than a decade as a solution of high-performance on-chip fixed, tunable and reconfigurable circuits. This paper reviews our research work on RF MEMS switches and switching circuits in the past five years. The research work first concentrates on the development of lateral DC-contact switches and capacitive shunt...
متن کاملModeling and Fabrication of RF MEMS Switches
MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...
متن کاملRF MEMS Switches
An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.
متن کاملDesign of Radio Frequency ( Rf ) Mems Switches – Modeling
Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for lar...
متن کامل3-D Computational Modeling of RF MEMS Switches
Young's modulus and residual stress state of freestanding thin membranes are characterized in this work by means of wafer level experimental techniques. RF MEMS Switches manufactured by Raytheon Systems Co. are investigated using a new method that combines a Membrane Deflection Experiment (MDE) and numerical simulations. It is found that the thin aluminum alloy membranes used in the RF MEMS dev...
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ژورنال
عنوان ژورنال: IEEE Microwave and Wireless Components Letters
سال: 2003
ISSN: 1531-1309,1558-1764
DOI: 10.1109/lmwc.2003.817121